Piezo actuator staack series#

In the working process, the phase of the driving voltage signal of the adjacent piezoelectric vibrator is 180 degrees, that is, the vibration direction of the adjacent piezoelectric vibrator is opposite in the working process. When PPFATC is connected in parallel, two groups of five-chambers mechanisms are formed in parallel, which can make the outlet obtain continuous fluid output without fluctuation when PPFATC is connected in series, two groups of five-chambers mechanisms are formed in series, namely ten chambers in series, which can make the output pressure increase. PPFATC is composed of five groups of single vibrator double chamber piezoelectric pumps in series, forming two group of five-chambers mechanisms. In the process of working, the fluid enters the chamber A and B from the inlet 1 and 2, and flows out from the outlet 1 and 2, so that the chamber A and B form a parallel connection, which can obtain a large flow rate.ģ.3 Piezoelectric pump with five actuators and ten chambersįigures 20 and 21 show the three-dimensional structure and working principle of piezoelectric pump with five actuators and ten chambers (PPFATC). Figure 12(b) shows the parallel connection of chamber A and B. In the process of working, the fluid enters the chamber B from the inlet 2, and the outlet 2 is connected with the inlet 1, and the liquid enters the chamber A through the inlet 1, so that chamber B and chamber A are in series, which can make the piezoelectric pump obtain high pressure.

Piezo actuator staack series#

Figure 12(a) shows the series connection of chambers A and B. The chamber A and chamber B of the piezoelectric pump can be connected in series or in parallel, which can improve the applicable range of the pressure and flow. Chamber A has inlet 1 and outlet 1, and chamber B has inlet 2 and outlet 2. 3.1 Piezoelectric pump with single actuator and double chamberĪs shown in Figure 12, the piezoelectric pump with single actuator and double chamber (PPSADC) includes a piezoelectric bimorph vibrator, two chambers (chamber A and B), four check valves and a pump body.